Plasma modelling using quantum computing


Problem

EUV Lithography machines have fundamental plasma challenges that reduce the quality of the machine’s performance and can even form a limit on how many high-quality chips can be produced worldwide.

Solution

ASML and TNO collaborate to explore how quantum computing solutions can improve the understanding of the EUV challenges and ameliorate their impact on lithography machines.

Benefit

By using quantum algorithms to improve the simulation of plasma physics inside machines, we can contribute to more durable machines, and better wafer yields.

Recent cases